Optical lithography of CMOS components.

Optical Systems, Computational Optics, EUV-Technology

MPSP Lecture by Prof. Carlo Holly (Aachen)
Optical lithography of CMOS components.
Image: Jenoptik AG
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Short CV of the lecturer

Professor, theoretical physicist and mechanical engineer with specialization in optical technology, photonics and numerical modeling. Holly studied mechanical engineering and physics at RWTH Aachen University and received his PhD in April 2019 from the RWTH Chair of Laser Technology LLT. In 2017, he joined TRUMPF Photonics in Cranbury, USA, where he worked on semiconductor laser development with focus on modeling of high-power diode lasers. In 2021 Prof. Holly became new head of the RWTH Chair for Technology of Optical Systems TOS, and since October 2022 he is the Head of Department Data Science and Measurement Technology at Fraunhofer ILT.